Abstract: Silicon nitride (SiN) hard mask (HM) has been investigated to achieve sub-100nm of high aspect ratio (HAR) pattern. In this study, SiN HM trimming technique is developed by mean of cyclic ...

polling-interval-seconds No '5' Polling interval in seconds when waiting for command completion timeout-seconds No '1200' Timeout in seconds when waiting for command completion ...

The jast module helps Python applications to process trees of the Java abstract syntax grammar. An abstract syntax tree can be generated by using the parse() function from this module. The result will ...

Abstract: The Industry 5.0 revolution has launched a new age of intelligent manufacturing equipment, which is crucial to our society and economy. Industry 5.0 aims to enhance human potential by ...